FIB-SEM hybrid system equipped with Hitachi High-Tech Science's latest FIB column and high performance FE-SEM, and FIB-SEM-Ar Triple Beam system equipped with ultra low kV Ar column which can handle the small sample to 200 mm wafer deliver such as high quality TEM sample preparation, Cut&See realtime high resolution obervation and 3D analysis, and EDS analysis.