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Tabletop Microscope TM3030

State: Out of stock
Magnification: 15 to 30,000×(digital zoom: 2×, 4×)
Observation condition: 5kV/15kV/EDX
Observation mode: Standard mode
Charge-up reduction mode
Image mode: COMPO/Shadow 1/Shadow 2/TOPO
Sample stage traverse: X: ±17.5 mm, Y: ±17.5 mm
Maximum sample size: 70 mm in diameter
Maximum sample height: 50 mm
Electron gun: Pre-centered cartridge filament
Signal detection system: High-sensitive semiconductor 4-segment BSE detector
Warranty: No warranty infomation

Price: Contact us

  • Delivery time: 8h00 - 18h00 daily
  • Genuine product, provided width CO, CQ
  • 03 months of free warranty for consumable and accessories
  • 12 months of free warranty for main equipment
  • Accessorie's price is applied only when purchased with
    main equipment
  • Contact us for any particular accessory's quotion
Email: Every day in week

Ease of Use:
  Compact and portable with incredibly simple operation


Tabletop installation


The space-saving and lightweight TM3030 can be conveniently installed on a tabletop*. No cooling water is needed, so installation is quick and easy and requires only a standard 100-240 V AC power supply.


*:requires a table capable of supporting 100 kg.


Comprehensive auto-functions, with one-click “Start”


Imaging with the TM3030 couldn’t be simpler. Pressing the “Start” button automatically turns on the beam, adjusts focus, brightness and contrast, as well as displays the image at an easy-to-view starting magnification of x100.

  Products TM3030


Optional accessories


No Sample Preparation Necessary:
  Versatile with a wide magnification range and multiple operating conditions


Image non-conducting specimens with ease


When a non-conductive sample is observed with a high-vacuum SEM, electrons accumulate on the specimen surface causes charge-up, preventing imaging. In order to avoid the charge-up damage, the sample is usually coated with a thin layer of metal prior to observation. This process is not only time-consuming, but also interferes with optical imaging of surface details as well as EDX analysis. The TM3030 overcomes this problem with “charge-up reduction mode.” This mode uses low-vacuum functionality to dissipate the charge.


Low-vacuum microscopy


By utilizing a low vacuum level inside the specimen chamber, more gas molecules are present. These gas molecules "G" can collide with the electron beam to generate positive ions "+" and electrons "e". Each positive ion "+" can be neutralized by one of the excess electrons "-" on the specimen surface. In this way the excess electrons on the surface of the sample are removed and the charge-up effect is eliminated or reduced.




Unparalleled Image Quality:
  Enhanced image resolution for surface details


5 kV mode


The 5 kV accelerating voltage allows observation of surface details. It offers not only traditional topographic imaging, but also compositional imaging information. The 5 kV observation condition is further enhanced throughout high magnifications by improving the electron optics.



Enhanced sharpness & contrast capability


These functions will be utilized to enhance image quality at any observation condition modes and will be very effective for high-magnification specimens.



Innovative premium SE/BSE signal detectors


The TM3030Plus is equipped with a premium secondary electron detector and a backscattered electron detector which have been incorporated in FE-SEM or VP-SEM. Note: The TM3030 has a backscattered electron detector only.

These detectors can be operated effectively under low-vacuum conditions and can conduct both SE and BSE image observation without metal coating.



Premium BSE image


Both the TM3030 and TM3030Plus feature a BSE detector with 4 independent segments. By adding or subtracting signals from segments in different combinations, it is possible to emphasize compositional or topographic details in the image, as well as to produce shadowed images which highlight the sample from a particular direction.



Optional 3D-View software can generate three-dimensional views of the sample without sample tilting and/or alignment. It uses the 4 directional surface profiles from the signals acquired with each segment of the 4-segment backscattered electron detector.





Large specimen handling


The large specimen stage allows the mounting of a specimen up to 70mm in diameter and 50mm thick. XY specimen motion 35mm.




What is the TM3030

Introduction to SEM


User Experience

Try a Virtual Demo of the TM3030Plus Now
Image Gallery




Motorized Stage Version  
Tilt Rotate Stage  
  Cooling System

Contact Us








×15 to ×60,000 (Up to ×240,000 with digital zoom)

Observation condition

5kV / 15kV / EDX

Observation mode

Standard mode
Charge-up reduction mode

BSE:Conductor / Standard / Charge-up Reduction
SE:Standard / Charge-up Reduction
Mix:Standard / Charge-up Reduction

Image mode

COMPO / Shadow 1 / Shadow 2 / TOPO

Sample stage traverse


Maximum sample size

70 mm in diameter

Maximum sample height

50 mm

Electron gun

Pre-centered cartridge filament

Signal detection system

High-sensitive semiconductor
4-segment BSE detector

Signal select



Auto image adjustment function

Auto start, Auto focus, Auto brightness/contrast

Frame memory

640 × 480 pixels, 1,280 × 960 pixels

Image data memory

HDD of PC and other removal media

Image format


Data display

Micron marker, micron value, date and time, image number and comments, Image mode, Observation condition, D* (Distance), Observation mode

Evacuation system (vacuum pump)

Turbomolecular pump: 30 L /s × 1 unit,
Diaphragm pump: 1 m
3/h × 1 unit

Operation help functions

Raster rotation, Magnification preset (two steps)
Image shift (±50 µm@D
*=4.5 mm)

Safety device

Over-current protection function, built-in ELCB


*:D (Distance) is defined as the distance between lower surface of a high-sensitive semiconductor BSE detector and sample surface.



Required PC specifications





Windows® 7 Professional (64bit version)


Intel® CoreTM i5-2520M (Equivalent or higher)

Memory size

2 GB minimum

Display monitor

1,280 × 800 pixels or 1,368 × 768 pixels

Display size

15-inch display

Interface connector

Installing USB 2.0 / 3.0 and PC-card slot
(IEEE1394 (6pin) for Oxford EDX is indispensable.)

Memory device

With HDD DVD-ROM Drive


More than 100MB of free space in HDD is required



*:An associated PC to be procured locally

*:Windows is a registered trademark of Microsoft Corporation in the United States and/or other countries.

*:Intel is a registered trademark of Intel Corp. or its affiliated companies in the United States and/or other countries.

*:Specifications of a PC are subject to change.



Dimensions and Weight





Main unit

330 (W) × 606 (D) × 565 (H) mm, 63.0 kg (manual stage)
330 (W) × 633 (D) × 565 (H) mm, 66.0 kg (motor drive stage)

330 (W) × 606 (D) × 565 (H) mm, 65.0 kg (manual stage)
330 (W) × 633 (D) × 565 (H) mm, 68.0 kg (motor drive stage)

Diaphragm pump

145 × 256 × 217 mm, 4.5 kg



Installation condition




Room temperature

15 to 30°C (Δt=±2.5°C/h or less)



Power source (TM3030)

Single-phase AC100 to 240 V
(Minimum: 90 V, Maximum: 250 V)


100 ohm or less


*:Another power source for PC is required.

*:A table with casters is not suitable to put a main unit of TM3030 on.

*:Recommended table size: 1,200×800 mm, withstand load: 100 kg or more.

*:Periodical maintenance is required for this apparatus.

*:Limited to indoor operation.

*:TM3030 is not approved as a medical device.

*:Powercables, earth terminal and table should be prepared by users.

*:Please put a diaphragm pump under the table.

*:Please make room for more than 200 mm to the left side of a main unit and put it the closest to the center position of the table.

*:It is advisable not to install or relocate the instrument by yourselves.

*:When relocating the system, please contact in advance the sales department that handles your account or a maintenance service company designated by Hitachi.

*:Dedicated mentors, teachers who received the operation training of the instrument are required at compulsory schools.

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