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Scanning Electron Microscope SU1510

State: In stock
The SU1510 is a medium size chamber Variable Pressure SEM with the same performance and features as the S-3400N and S-3700N models. Quad Bias gun electronics greatly improves low voltage performance and increases beam current well suited for today's SDD X-ray detectors. Dual high-take-off ports accommodate two EDS detectors mounted 180 degrees apart for tice the analytical data collection plus eliminates X-ray map shadows associated with rough sample surfaces. A high speed, clean, efficient TMP eliminates the need for water cooling.
Compact, high performance and easy to use makes the SU1510 a great general purpose VPSEM for any advanced laboratory.
Warranty: No warranty infomation

Price: Contact us

  • Delivery time: 8h00 - 18h00 daily
  • Genuine product, provided width CO, CQ
  • 03 months of free warranty for consumable and accessories
  • 12 months of free warranty for main equipment
  • Accessorie's price is applied only when purchased with
    main equipment
  • Contact us for any particular accessory's quotion
Email: Every day in week

● Turbo Molecular Pump (TMP) is standard. As an oil-free pumping system, sample contamination is minimised.

   Unlike conventional oil diffusion pumped SEM, it does not require large heating capacity or water re-circulator, making it an energy saving ecological SEM.

● To assist inexperienced users the SU1510 includes an on-screen operation guide that walks the user step by step through the complete imaging process - from vacuum mode

   selection to image capture. This unique feature allows users of all experience levels to quickly obtain high quality images.

● The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron resolution of 3.0 nm (high vacuum mode) and a guaranteed backscattered

   electron resolution of 4.0 nm (variable pressure mode).

● For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode that eliminates negative charging, and provides the optimum conditions for both imaging

   and EDX microanalysis(*1).

● The specimen chamber and stage have been designed to accommodate samples as large as 153 mm in diameter. Simultaneous EDX microanalysis and imaging can be completed

   on a sample that is up to 60mm in height at the analytical working distance of 15 mm.

● The ESED-II*2 is optionally available if secondary electron imaging in variable pressure mode is desired. This detector is integrated into the GUI of the SU1510 and is completely

   software driven with all automatic features ready for instant use by the operator.


*1:Energy Dispersive X-ray Microanalysis(option)
*2:Environmental Secondary Electron Detector II(option)
*   :Table is to be prepared locally.
*   :The images are simulated, and are not actual images.



Resolution SE

3.0 nm at 30 kV (High Vacuum Mode)

Resolution BSE

4.0 nm at 30 kV (Variable Pressure Mode)


×5 to ×300,000

Accelerating Voltage

0.3 to 30 kV

Low vacuum Range

6 to 270 Pa through graphic menu

Image Shift

±50 µm (WD=15 mm)

Maximum Specimen Size

153 mm in diameter

Specimen Stage


0 to 80 mm


0 to 40 mm


5 to 50 mm




-20° to 90°

Observable area

126 mm in diameter (with rotation)

Maximum Height

60 mm (WD=15 mm)

Electron Optics

Electron Gun

Precentered Cartridge Filament

Objective Aperture

5-position, click stop objective aperture

Gun Bias

Quad bias with variable bias control


Secondary Electron Detector

High Sensitivity Semiconductor BSE Detector

Analytical Position

WD = 15mm, TOA = 35°



Windows® XP (subject to change without notice)


Mouse, Keyboard


19 type LCD (subject to change without notice)

Auto Alignment

Auto Beam Setting, Auto Axial Alignment

Auto Image Adjustment

Auto Focus, Auto Stigmator/Focus

Auto Brightness & Contrast

Image Data Saving

640 × 480 pixels, 1,280 × 960 pixels

2,560 × 1,920 pixels, 5,120 × 3,840 pixels

Image Filing

Search Functions / Built-in Image Data Base with Image Processing Functions

Filing Format


Auto Data Display

Accelerating Voltage, Magnification, Micron Marker, Unit, Working Distance,Date/Time, Detector, Pressure

Image Display Mode

Full Screen Display : 1,280 × 960 pixels

Small Screen Display : 640 × 480 pixels

Dual Image Display : 640 × 480 pixels ×2

Signal Mixing

Evacuation System


Full Automatic Sequence

Turbo molecular pump

210 L/s × 1

Oil Rotary Pump

135 L/min (162 L/min. with 60 Hz) × 1


Power Failure and Vacuum Failure

Auxiliary Functions

Raster Rotation

Dynamic Focus/Tilt Compensation

Dynamic Stigma Monitor

Free Layout Print Function

3D Animation Maintenance Guide

Operation Guide

Easy Measurement

Oblique image

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